Title:
DEVICE FOR X-RAY LITHOGRAPHY
Document Type and Number:
WIPO Patent Application WO/2002/054413
Kind Code:
A1
Abstract:
The inventive device comprises a soft X-ray source (1), a hemilens (2) in order to transform a divergent radiation of said source into a quasiparallel radiation provided with a large number of channels for transmitting radiation using a total external reflection, said channels being directed along elements of a barrel-shaped surface, means for disposing a mask (3) and a substrate (4) with a resistor (5) applied thereto. Said substrate and resistor are arranged on the side of the output end of the hemilenses (2). The device also comprise an absorbent-type filter (6) in order to smooth intensity irregularities of the hemilens output beam. The ratio between cross-sectional dimensions of the hemilens and the focal distance thereof on the input side is chosen in such a way that the entrance angle of radiation of the source is maintained within the following range: 0.7/ E ?1.5¿ $m(F)$g(C)$m(G) 1.3/e ?1.5¿, where, $g(C) is the entrance angle of radiation [rad]; E is the radiant energy of the used source [keV]. Material of the reflecting surface of the channels transmitting radiation contains elements having an atomic number equal to or less than 22, the radiant energy of the source ranging from 0.6 to 6.0 keV.
Inventors:
KUMAKHOV MURADIN ABUBEKIROVICH (RU)
Application Number:
PCT/RU2001/000134
Publication Date:
July 11, 2002
Filing Date:
April 03, 2001
Export Citation:
Assignee:
KUMAKHOV MURADIN ABUBEKIROVICH (RU)
International Classes:
G21K5/00; G03B42/02; G03F7/20; G21K1/06; G21K5/02; H01L21/027; (IPC1-7): G21K5/00; G03B42/02
Foreign References:
| US5175755A | 1992-12-29 | |||
| SU1639313A1 | 1998-04-20 | |||
| RU2109358C1 | 1998-04-20 | |||
| RU2122757C1 | 1998-11-27 | |||
| US4969169A | 1990-11-06 |
Other References:
See also references of EP 1347461A4
Attorney, Agent or Firm:
Vasilieva, Mariya Egorovna (10 Moscow, RU)
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