Title:
DIFFERENTIAL EXHAUST DEVICE AND FOCUSED ENERGY BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/004229
Kind Code:
A1
Abstract:
This differential exhaust device provides a high degree of vacuum to a treatment space. The differential exhaust device is provided with: a displacement driving unit that, by displacing a head unit or a to-be-treated substrate, is capable of adjusting a distance and a parallelism between a to-be-treated surface and an opposing surface of the head unit; gap measurement units that are disposed at at least 3 places along a periphery of the opposing surface of the head unit and that are capable of detecting a distance between the opposing surface and the to-be-treated surface; and a gap control unit that, on the basis of information about the distance that is between the opposing surface and the to-be-treated surface and that is detected by the gap measurement unit, controls the displacement driving unit such that the opposing surface and the to-be-treated surface are in parallel to each other with a predetermined distance therebetween.
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Inventors:
MIZUMURA MICHINOBU (JP)
ARAI TOSHINARI (JP)
MATSUMOTO TAKANORI (JP)
TAKESHITA TAKURO (JP)
ARAI TOSHINARI (JP)
MATSUMOTO TAKANORI (JP)
TAKESHITA TAKURO (JP)
Application Number:
PCT/JP2021/020641
Publication Date:
January 06, 2022
Filing Date:
May 31, 2021
Export Citation:
Assignee:
V TECH CO LTD (JP)
International Classes:
H01J37/16; G03F7/20; H01J37/18; H01J37/28; H01J37/305; H01J37/317; H01L21/027
Foreign References:
| JPS5993249A | 1984-05-29 | |||
| JP2008123891A | 2008-05-29 | |||
| JP2019179748A | 2019-10-17 | |||
| JPH01128525A | 1989-05-22 | |||
| JP2014157772A | 2014-08-28 | |||
| JP2020031156A | 2020-02-27 |
Attorney, Agent or Firm:
NISSAY INTERNATIONAL PATENT OFFICE (JP)
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