Title:
DISCHARGE IONIZATION CURRENT DETECTOR AND METHOD FOR AGING TREATMENT OF SAME
Document Type and Number:
WIPO Patent Application WO/2013/136482
Kind Code:
A1
Abstract:
An aging treatment is carried out using a cleaning gas prepared by mixing a plasma gas with an inert gas that serves as an impurity. A high-voltage alternating-current voltage is applied to an electrode (6) while supplying the cleaning gas from a gas inlet (12)into a dielectric tube (4) to perform the generation of plasma by means of dielectric barrier discharge until a predetermined time is elapsed. Thereafter, the gas to be supplied from the gas inlet (12) is switched to a plasma gas, the application of the high-voltage alternating-current voltage to the electrode (6) is continued, the generation of plasma by means of discharge is continued until an output signal from a current amplifier (28) can be stabilized, and the cleaning gas in the dielectric tube (4) and a tube (5) is replaced by the plasma gas completely.
Inventors:
HORIIKE SHIGEYOSHI (JP)
SHINADA KEI (JP)
NISHIMOTO TAKAHIRO (JP)
SHINADA KEI (JP)
NISHIMOTO TAKAHIRO (JP)
Application Number:
PCT/JP2012/056674
Publication Date:
September 19, 2013
Filing Date:
March 15, 2012
Export Citation:
Assignee:
SHIMADZU CORP (JP)
HORIIKE SHIGEYOSHI (JP)
SHINADA KEI (JP)
NISHIMOTO TAKAHIRO (JP)
HORIIKE SHIGEYOSHI (JP)
SHINADA KEI (JP)
NISHIMOTO TAKAHIRO (JP)
International Classes:
G01N27/68
Domestic Patent References:
| WO2009119050A1 | 2009-10-01 |
Foreign References:
| JP2011158357A | 2011-08-18 | |||
| JP2012008088A | 2012-01-12 | |||
| US5892364A | 1999-04-06 | |||
| US5394092A | 1995-02-28 |
Attorney, Agent or Firm:
NOGUCHI SHIGEO (JP)
Shigeo Noguchi (JP)
Shigeo Noguchi (JP)
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