DISPLAY PANEL AND MANUFACTURING METHOD THEREFOR

WIPO Patent Application WO/2020/042258

A1

Disclosed is a display panel and a manufacturing method (10) therefor. The manufacturing method (10) of the display panel comprises steps of providing a substrate (21); forming a gate (22) on the substrate (21); forming a gate insulating layer (23) on the gate (22) and the substrate (21); forming a polysilicon layer (24) on the gate insulating layer (23); performing a first grayscale masking process on the polysilicon layer (24) to form a source region (241), a drain region (242), and an active region (243) between the source region (241) and the drain region (242) in the polysilicon layer (24); forming an interlayer dielectric layer (25) on the gate insulating layer (23) and the polysilicon layer (24); forming a first electrode layer (26) on the interlayer dielectric layer (25); and performing a second grayscale masking process on the first electrode layer (26) and the interlayer dielectric layer (25), wherein the second grayscale masking process comprises patterning the first electrode layer (26) to form a first electrode pattern layer (261); and forming a source via (25A) and a drain via (25B) in the interlayer dielectric layer (25), wherein the source via (25A) exposes the source region (241) and the drain via (25B) exposes the drain region (242).

WANG CHAO (CN)
LIU GUANGHUI (CN)
YAN YUAN (CN)

PCT/CN2018/107203

March 05, 2020

September 25, 2018

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WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO LTD (CN)

G02F1/1362; G02F1/1333; H01L21/77; H01L27/32

CN208738249U	2019-04-12
CN107527819A	2017-12-29
CN106898613A	2017-06-27
CN101150092A	2008-03-26
CN102646717A	2012-08-22
US20150037943A1	2015-02-05

ESSEN PATENT&TRADEMARK AGENCY (CN)

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