Title:
DISSOLUTION PRECIPITATION DEVICE FOR IONS OR SALT COMPONENTS PRESENT ON SUBSTRATE SURFACE AND DISSOLUTION PRECIPITATION METHOD USING SAME
Document Type and Number:
WIPO Patent Application WO/2022/270661
Kind Code:
A1
Abstract:
The present invention relates to a dissolution precipitation device for ions and salt components present on the surface of a substrate and a dissolution method using same. Particularly, the dissolution precipitation device for ions and salt components present on the surface of a substrate, according to the present invention, comprises: a chamber in which cleaning treatment is performed on the substrate loaded; a grip device which is provided in the chamber and fixes the substrate; and a fan filter unit (FFU) which is installed at one side of the chamber to generate a blowing airflow of clean air in the chamber, wherein the chamber is composed of two regions divided around the substrate, so as to have a closed structure without mutual interference.
Inventors:
CHOI YONG KYOO (KR)
Application Number:
PCT/KR2021/008099
Publication Date:
December 29, 2022
Filing Date:
June 28, 2021
Export Citation:
Assignee:
SUN SEMICONDUCTOR (KR)
International Classes:
G03F1/82; B08B11/00; G03F7/20
Foreign References:
| US20200057367A1 | 2020-02-20 | |||
| KR20180129106A | 2018-12-05 | |||
| US20200243360A1 | 2020-07-30 | |||
| US20200124994A1 | 2020-04-23 | |||
| KR20160006073A | 2016-01-18 |
Attorney, Agent or Firm:
KIM, Jung Su (KR)
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