Title:
DISTANCE MEASUREMENT METHOD, DISTANCE MEASUREMENT DEVICE, AND DISTANCE MEASUREMENT SYSTEM
Document Type and Number:
WIPO Patent Application WO/2024/070034
Kind Code:
A1
Abstract:
The present invention provides a distance measurement device and a distance measurement method that can reduce a distance error caused by polarization. The distance measurement method splits light generated in a laser light source to a reference optical system and a measurement optical system, detects a reference optical path measurement beat signal from reference light having passed through the reference optical system, detects a measurement optical path measurement beat signal from measurement light having routed through an object of measurement in the measurement optical system, and measures a distance to the object of measurement on the basis of the measurement optical path measurement beat signal and the reference optical path measurement beat signal, the distance measurement method being characterized in that a polarization-caused distance error reduction element is installed in one or both of the reference optical system and the measurement optical system.
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Inventors:
HARIYAMA TATSUO (JP)
WATANABE MASAHIRO (JP)
MARUNO KENJI (JP)
AKIYAMA HIROHITO (JP)
KANDO HIDEHIKO (JP)
WATANABE MASAHIRO (JP)
MARUNO KENJI (JP)
AKIYAMA HIROHITO (JP)
KANDO HIDEHIKO (JP)
Application Number:
PCT/JP2023/018154
Publication Date:
April 04, 2024
Filing Date:
May 15, 2023
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
G01C3/06; G01B9/02004; G01B9/02015; G01B9/02056; G01B11/24
Attorney, Agent or Firm:
POLAIRE I.P.C. (JP)
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