Title:
DOUBLE-STATION VACUUM PROCESSOR FOR USE IN UNIFORM VACUUM PUMPING
Document Type and Number:
WIPO Patent Application WO/2018/121603
Kind Code:
A1
Abstract:
A double-station vacuum processor for use in uniform pumping, which is provided with two vacuum processing chambers (10) which may act as processing reaction chambers, and a shared offset air suction port (20) and vacuum pump which are in communication with said two vacuum processing chambers, wherein an area within each vacuum processing chamber which is close to the offset air suction port is provided with a damper having a set thickness in the vertical direction so as to reduce the suction rate of a gas of a proximal end (41) of the air suction port in order to balance the same with the suction rate of a gas of a distal end (42) of the air suction port, thereby improving the impact of chamber offset on processing uniformity; moreover, a channel which is in communication with the atmospheric environment outside of a chamber is further opened at an inner portion of a rib (60) which may act as the damper, thereby facilitating a connection between a cable pipeline within the chamber and the outside.
Inventors:
GONG YUEJUN (CN)
ZUO RASON (CN)
NI TUQIANG (CN)
WU DEE (CN)
ZHOU NING (CN)
CHEN KELVIN (CN)
ZUO RASON (CN)
NI TUQIANG (CN)
WU DEE (CN)
ZHOU NING (CN)
CHEN KELVIN (CN)
Application Number:
PCT/CN2017/118976
Publication Date:
July 05, 2018
Filing Date:
December 27, 2017
Export Citation:
Assignee:
ADVANCED MICRO FABRICATION EQUIPMENT INC CHINA (CN)
International Classes:
H01J37/32
Foreign References:
| CN101809708A | 2010-08-18 | |||
| CN103021778A | 2013-04-03 |
Attorney, Agent or Firm:
SUNSHINEIP INTELLECTUAL PROPERTY LAW FIRM (CN)
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