Title:
DUAL ROBOT PROCESSING SYSTEM
Document Type and Number:
WIPO Patent Application WO2003052802
Kind Code:
A3
Abstract:
A substrate processing system having a transfer chamber having two processing chambers and two load lock chambers coupled thereto is generally provided. The transfer chamber includes a body having a first transfer area and a second transfer area defined therein on either side of a center axis. A first passage couples one of the load locks with the first transfer area and a second passage couples the other one of the load locks with the second transfer area. The first passage and the second passage form an acute angle about the center axis. A transfer platform is disposed between the first transfer area and the second transfer area. A first transfer robot and a second transfer robot are disposed in the first and second transfer areas, respectively. Each robot is adapted to transfer substrates between the load locks, the transfer platform and a processing chamber.
Inventors:
LEI LAWRENCE C
KORI MORIS
KORI MORIS
Application Number:
PCT/US2002/041721
Publication Date:
December 11, 2003
Filing Date:
December 13, 2002
Export Citation:
Assignee:
APPLIED MATERIALS INC (US)
International Classes:
B65G49/07; H01L21/00; H01L21/677; (IPC1-7): H01L21/00
Foreign References:
| EP1146548A1 | 2001-10-17 | |||
| EP1107288A2 | 2001-06-13 | |||
| US5357115A | 1994-10-18 |
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