DUAL-WALL MULTI-STRUCTURE QUARTZ CYLINDER DEVICE

Title:

DUAL-WALL MULTI-STRUCTURE QUARTZ CYLINDER DEVICE

Document Type and Number:

WIPO Patent Application WO/2022/110774

Kind Code:

A1

Abstract:

A double-wall multi-structure quartz cylinder device, belonging to the technical field of ion beam etching. Said device specifically comprises a quartz cylinder outer wall, at least one quartz cylinder inner liner being provided inside the quartz cylinder outer wall, axes of the two coinciding with each other, and a quartz cylinder inner liner support being connected between the quartz cylinder inner liner and the quartz cylinder outer wall. The quartz cylinder outer wall and the bottom of the quartz cylinder inner liner are connected to a grid mesh, most of etching by-products will be sputtered onto an inner surface of the quartz cylinder inner liner through voids of the grid mesh, and less etching by-products will be attached to an inner wall of the quartz cylinder outer wall, such that the whole radio frequency circuit is less affected by contamination. In other words, the etching rate is less affected by contamination, prolonging the service life of the quartz tube device, reducing the etching cost, and increasing the MTBC time of ion beam etching.

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Inventors:

LIU HAIYANG (CN)
HU DONGDONG (CN)
LIU XIAOBO (CN)
CHENG SHIRAN (CN)
GUO SONG (CN)
ZHANG XIAO (CN)
CHEN LU (CN)
XU KAIDONG (CN)

Application Number:

PCT/CN2021/100677

Publication Date:

June 02, 2022

Filing Date:

June 17, 2021

Export Citation:

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Assignee:

JIANGSU LEUVEN INSTR CO LTD (CN)

International Classes:

H01J37/32

Foreign References:

CN112447486A	2021-03-05
CN101223624A	2008-07-16
JP2000133497A	2000-05-12
US5234529A	1993-08-10

Other References: