DYNAMIC QUANTITY SENSOR AND METHOD OF MANUFACTURING IT

Title:

DYNAMIC QUANTITY SENSOR AND METHOD OF MANUFACTURING IT

Document Type and Number:

WIPO Patent Application WO/2008/062705

Kind Code:

A1

Abstract:

A dynamic quantity sensor comprises a first structure having fixed parts with openings, displacement parts disposed in the openings and displaced relative to the fixed parts, and a connection part for connecting the fixed parts to the displacement parts, a second structure having weight parts joined to the displacement parts and pedestals so disposed as to surround the weight parts and joined to the fixed parts and placed on the first structure, a first base connected to the fixed parts and placed on the first structure, and a second base connected to the pedestals and placed on the second structure. After the first structure is prepared and before the second base is joined to the second structure, the thicknesses of the weight parts are adjusted.

Inventors:

TAKESHITA KIYOKAZU (JP)
AIDA KAZUHIKO (JP)

Application Number:

PCT/JP2007/072162

Publication Date:

May 29, 2008

Filing Date:

November 15, 2007

Export Citation:

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Assignee:

DAINIPPON PRINTING CO LTD (JP)
TAKESHITA KIYOKAZU (JP)
AIDA KAZUHIKO (JP)

International Classes:

G01C19/56; G01P15/18

Foreign References:

JP2002350138A	2002-12-04
JP2005249454A	2005-09-15
JP2003347883A	2003-12-05
JPH0798327A	1995-04-11
JP2001280971A	2001-10-10

Other References: