Title:
ELECTRONIC COMPONENT PROVIDED WITH Cu-Al-Co-BASED ALLOY ELECTRODE OR WIRING
Document Type and Number:
WIPO Patent Application WO/2010/116746
Kind Code:
A1
Abstract:
Provided is an electronic component using a Cu-based electrical conducting material which can prevent oxidation during a heat treatment, even in an oxidative atmosphere, and prevent an increase in electrical resistance. Disclosed is an electronic component provided with an electrode or a wiring, characterized in that a three-component alloy consisting of Cu, Al and Co elements is used as a Cu-based wiring material by which oxidation of the electrode or wiring can be prevented. Specifically disclosed is an electronic component provided with an electrode or a wiring, characterized in that the electrode or wiring partially or entirely comprises a three-component alloy which has a chemical composition consisting of 10-25 at% of Al, 5-20 at% of Co and the balance of Cu with unavoidable impurities, and in which two phases, namely, a Cu solid solution comprising Al and Co dissolved in Cu and a Co-Al intermetallic compound, are present together.
Inventors:
KATO TAKAHIKO (JP)
NAITO TAKASHI (JP)
YAMAMOTO HIROKI (JP)
AOYAGI TAKUYA (JP)
WATANABE SEIICHI (JP)
MIURA SEIJI (JP)
SAKAGUCHI NORIHITO (JP)
AOSHIMA KAZUKI (JP)
OHKUBO KENJI (JP)
NAITO TAKASHI (JP)
YAMAMOTO HIROKI (JP)
AOYAGI TAKUYA (JP)
WATANABE SEIICHI (JP)
MIURA SEIJI (JP)
SAKAGUCHI NORIHITO (JP)
AOSHIMA KAZUKI (JP)
OHKUBO KENJI (JP)
Application Number:
PCT/JP2010/002573
Publication Date:
October 14, 2010
Filing Date:
April 08, 2010
Export Citation:
Assignee:
HITACHI LTD (JP)
KATO TAKAHIKO (JP)
NAITO TAKASHI (JP)
YAMAMOTO HIROKI (JP)
AOYAGI TAKUYA (JP)
WATANABE SEIICHI (JP)
MIURA SEIJI (JP)
SAKAGUCHI NORIHITO (JP)
AOSHIMA KAZUKI (JP)
OHKUBO KENJI (JP)
KATO TAKAHIKO (JP)
NAITO TAKASHI (JP)
YAMAMOTO HIROKI (JP)
AOYAGI TAKUYA (JP)
WATANABE SEIICHI (JP)
MIURA SEIJI (JP)
SAKAGUCHI NORIHITO (JP)
AOSHIMA KAZUKI (JP)
OHKUBO KENJI (JP)
International Classes:
C22C9/06; C22C9/01; H01J9/02; H01J11/02; H01L21/28; H01L21/285; H01L21/3205; H01L23/52; H01L31/04; H05K1/09
Foreign References:
| JP2002294437A | 2002-10-09 | |||
| JPH09199976A | 1997-07-31 | |||
| JPH08125341A | 1996-05-17 | |||
| JP2007305528A | 2007-11-22 | |||
| JP2004207009A | 2004-07-22 | |||
| JP2003277170A | 2003-10-02 |
Attorney, Agent or Firm:
POLAIRE I. P. C. (JP)
Polaire Intellectual Property Corporation (JP)
Polaire Intellectual Property Corporation (JP)
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