Title:
ELASTIC BOUNDARY-WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2008/044411
Kind Code:
A1
Abstract:
Provided is an elastic boundary-wave device, which utilizes elastic boundary-waves to propagate through a boundary between LiNbO3 or LiTaO3 and a dielectric layer so that the loss is reduced by making use of SH-type elastic boundary-waves although the electrode film is made thin. In the elastic boundary-wave device, a plurality of grooves (1b) are formed in the upper face of a LiNbO3 substrate (1) and are filled with a metallic material to form an electrode film (3) including IDT electrodes. A dielectric layer (4) such as a SiO2 film is formed to cover the upper face (1a) of the piezoelectric substrate (1) and the electrode film (3), and is flattened on its surface. The thickness of the electrode film (3), the Euler's angle (θ) (0 degrees, θ, -45 degrees - +45 degrees) of the LiNbO3 substrate and the thickness of the dielectric layer (4) are defined within any of the ranges tabulated in the following Table 1.
Inventors:
KADOTA MICHIO (JP)
KIMURA TETSUYA (JP)
KIMURA TETSUYA (JP)
Application Number:
PCT/JP2007/067583
Publication Date:
April 17, 2008
Filing Date:
September 10, 2007
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
KADOTA MICHIO (JP)
KIMURA TETSUYA (JP)
KADOTA MICHIO (JP)
KIMURA TETSUYA (JP)
International Classes:
H03H9/145; H01L41/09; H01L41/18; H03H9/25
Domestic Patent References:
| WO1998052279A1 | 1998-11-19 | |||
| WO2006011417A1 | 2006-02-02 |
Foreign References:
| JP2004159262A | 2004-06-03 | |||
| JPH1084246A | 1998-03-31 | |||
| JPH10335974A | 1998-12-18 | |||
| US20060071579A1 | 2006-04-06 |
Other References:
"RF Filter using Boundary Acoustic Wave", PROC. SYMP. ULTRASON. ELECTRON., vol. 26, November 2005 (2005-11-01), pages 25 - 26
See also references of EP 2056456A4
See also references of EP 2056456A4
Attorney, Agent or Firm:
MIYAZAKI, Chikara (5-4 Tanimachi 1-chome, Chuo-ku, Osaka-sh, Osaka 12, JP)
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