Title:
ELASTIC WAVE DEVICE AND COMMUNICATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/261485
Kind Code:
A1
Abstract:
This elastic wave device comprises a composite substrate and an excitation electrode positioned on an upper surface of the composite substrate. The composite substrate comprises a support substrate, a multilayer film, and a piezoelectric film. The multilayer film comprises a plurality of acoustic films stacked on an upper surface of the support substrate, wherein the acoustic films that are adjacent to each other in the stacking direction comprise different materials. The piezoelectric film overlies an upper surface of the multilayer film. The excitation electrode is positioned on an upper surface of the piezoelectric film. The side surface of the composite substrate comprises a step portion having a stair-like shape with two or more levels rising from the support substrate side to the piezoelectric film side while proceeding from the outside of the side surface toward the inside of the side surface.
Inventors:
ITO MOTOKI (JP)
Application Number:
PCT/JP2021/023593
Publication Date:
December 30, 2021
Filing Date:
June 22, 2021
Export Citation:
Assignee:
KYOCERA CORP (JP)
International Classes:
H01L41/047; H01L41/09; H03H9/145; H03H9/25
Domestic Patent References:
| WO2016088543A1 | 2016-06-09 |
Foreign References:
| JPH0482315A | 1992-03-16 | |||
| JP2019220794A | 2019-12-26 | |||
| JP2003087073A | 2003-03-20 |
Attorney, Agent or Firm:
IIJIMA, YASUHIRO (JP)
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