Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/013946
Kind Code:
A1
Abstract:
Provided is an elastic wave device wherein a laminated structure configured from an adhesion layer, first electrode layer, diffusion preventing layer, and second electrode layer has excellent weather resistance. An IDT electrode 3 is provided on a piezoelectric substrate 2, and the IDT electrode 3 has: an adhesion layer 11, which has first and second main surfaces 2a and 2b, and a side surface 11c, and which is provided such that the first main surface 2a is in contact with the piezoelectric substrate 2; and two or more electrode layers that are provided on the adhesion layer 11. The IDT electrode has a first electrode layer 12 and a second electrode layer 14 among the two or more electrode layers. The first electrode layer 12 is formed of a material having a higher density than Al. The second electrode layer 14 has a lower density than the first electrode layer 12. At least one of the two or more electrode layers has a higher weather resistance than the adhesion layer 11, and is provided to cover the side surface 11c of the adhesion layer 11.
Inventors:
KONOMA CHIHIRO (JP)
Application Number:
PCT/JP2016/066249
Publication Date:
January 26, 2017
Filing Date:
June 01, 2016
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/145
Domestic Patent References:
| WO2010122993A1 | 2010-10-28 |
Foreign References:
| JP2012034418A | 2012-02-16 | |||
| JP2005516517A | 2005-06-02 | |||
| JP2012186696A | 2012-09-27 | |||
| JPH10135766A | 1998-05-22 | |||
| JP2001217672A | 2001-08-10 | |||
| JPH0522067A | 1993-01-29 | |||
| JP2005518127A | 2005-06-16 |
Attorney, Agent or Firm:
MIYAZAKI & METSUGI (JP)
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