Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/220887
Kind Code:
A1
Abstract:
The present invention provides an elastic wave device that enables more reliable transverse mode suppression. An elastic wave device 1 according to the present invention comprises: a piezoelectric substrate 2; and an IDT electrode 7 that is provided upon the piezoelectric substrate 2 and has a plurality of electrode fingers. A section where adjacent electrode fingers of the IDT electrode 7 overlap in the elastic wave propagation direction is designated as a crossover region A. The crossover region A includes: a center region C that is positioned toward the center in the direction in which the plurality of electrode fingers extend; and first and second edge regions E1, E2 that are respectively disposed on both sides of the center region C in the direction in which the plurality of electrode fingers extend. The elastic wave device 1 further comprises, in the respective first and second edge regions E1, E2, dielectric films 15A, 15B that are provided between the piezoelectric substrate 2 and the plurality of electrode fingers. The dielectric films 15A, 15B are formed from at least one dielectric selected from the group consisting of hafnium oxides, niobium oxides, tungsten oxides, and cerium oxides.
Inventors:
DAIMON KATSUYA (JP)
Application Number:
PCT/JP2021/016046
Publication Date:
November 04, 2021
Filing Date:
April 20, 2021
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/145; H03H9/25
Domestic Patent References:
| WO2009098840A1 | 2009-08-13 | |||
| WO2019194140A1 | 2019-10-10 | |||
| WO2018216417A1 | 2018-11-29 | |||
| WO2021039038A1 | 2021-03-04 |
Foreign References:
| JP2014509134A | 2014-04-10 | |||
| JP2017503432A | 2017-01-26 | |||
| US20170155373A1 | 2017-06-01 | |||
| JP2013518455A | 2013-05-20 | |||
| JP2018006851A | 2018-01-11 | |||
| JP2020048067A | 2020-03-26 | |||
| JP2019075704A | 2019-05-16 |
Attorney, Agent or Firm:
MIYAZAKI & METSUGI (JP)
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