Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/246454
Kind Code:
A1
Abstract:
Provided is an elastic wave device in which a piezoelectric film located on a cavity is unlikely to be cracked. An elastic wave device 1 is provided with a piezoelectric film 2 and an IDT electrode 10 on the piezoelectric film 2, wherein the IDT electrode 10 includes first and second bus bars 5 and 6, at least one first electrode finger 3 and at least one second electrode finger 4, and where a region in which the first and second electrode fingers 3 and 4 overlap in the elastic wave propagation direction is taken as a crossing region, all of the points A2, B2, C2, and D2 defined as described hereinbelow are outside the cavity when xa < 25 µm, ya < 25 µm, xb < 25 µm, yb < 25 µm, xc < 25 µm, yc < 25 µm, xd < 25 µm, and yd < 25 µm in the points A2, B2, C2, and D2.
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Inventors:
KIMURA TETSUYA (JP)
NODAKE NAOHIRO (JP)
ISHII YUTA (JP)
INOUE KAZUNORI (JP)
OUCHI MINEFUMI (JP)
NAGATOMO SHO (JP)
NODAKE NAOHIRO (JP)
ISHII YUTA (JP)
INOUE KAZUNORI (JP)
OUCHI MINEFUMI (JP)
NAGATOMO SHO (JP)
Application Number:
PCT/JP2021/021061
Publication Date:
December 09, 2021
Filing Date:
June 02, 2021
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/145; H03H9/17
Domestic Patent References:
| WO2017077892A1 | 2017-05-11 | |||
| WO2015170528A1 | 2015-11-12 | |||
| WO2014054580A1 | 2014-04-10 |
Foreign References:
| US20190386635A1 | 2019-12-19 | |||
| JP2013214954A | 2013-10-17 |
Attorney, Agent or Firm:
MIYAZAKI & METSUGI (JP)
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