Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/059758
Kind Code:
A1
Abstract:
Provided is an elastic wave device that suppresses ripples in frequency characteristics. The elastic wave device comprises: a support substrate; a piezoelectric layer overlapping the support substrate when viewed in a first direction of the support substrate; and a functional electrode provided on a first major surface of the piezoelectric layer. A space portion is provided on a second major surface side of the piezoelectric layer opposite the first major surface of the piezoelectric layer. The functional electrode is disposed straddling a superimposing region overlapping the space portion and a non-superimposing region not overlapping the space portion in the first direction. At least one of an insulating film and a gap is provided in the non-superimposing region between the functional electrode and the piezoelectric layer.
Inventors:
INOUE KAZUNORI (JP)
Application Number:
PCT/JP2021/034203
Publication Date:
March 24, 2022
Filing Date:
September 16, 2021
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/17; H03H9/145; H03H9/25
Domestic Patent References:
| WO2013031724A1 | 2013-03-07 | |||
| WO2007119643A1 | 2007-10-25 | |||
| WO2017179300A1 | 2017-10-19 |
Foreign References:
| JP2009232189A | 2009-10-08 |
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (JP)
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