Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/131216
Kind Code:
A1
Abstract:
Provided is an elastic wave device that can suppress variation in the thickness of a piezoelectric layer, and that can suppress deterioration in frequency properties. An elastic wave device 1 according to the present invention comprises: a support member 13 having a support substrate 16 and an intermediate layer 15 laminated on the support substrate 16; a piezoelectric layer 14 provided on the intermediate layer 15; and an IDT electrode 25 (excitation electrode) provided on the piezoelectric layer 14. A hollow part is provided in the support member 13. The piezoelectric layer 14 includes a membrane part 14d that overlaps with the hollow part in a planar view. At least part of the IDT electrode 25 is provided to the membrane part 14d. The elastic wave device also comprises a spacer layer 11 which is provided in the support member 13 and which is made from a material differing from that of the piezoelectric layer 14 and the intermediate layer 15. The spacer layer 11 is disposed in a part other than the hollow part.
Inventors:
SUZUKI KATSUMI (JP)
Application Number:
PCT/JP2021/045846
Publication Date:
June 23, 2022
Filing Date:
December 13, 2021
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/25
Domestic Patent References:
| WO2016068003A1 | 2016-05-06 | |||
| WO2012073871A1 | 2012-06-07 |
Foreign References:
| JP2019154031A | 2019-09-12 | |||
| JP2013528996A | 2013-07-11 | |||
| JP2018125792A | 2018-08-09 |
Attorney, Agent or Firm:
MIYAZAKI & METSUGI (JP)
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