Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/210694
Kind Code:
A1
Abstract:
An elastic wave device 10A is provided with: a piezoelectric layer 12 having a first main surface 12a and a second main surface 12b facing each other; a functional electrode 14 provided on at least one of the first main surface 12a and the second main surface 12b of the piezoelectric layer 12; and a support substrate 11 stacked on the second main surface 12b side of the piezoelectric layer 12. A hollow portion 13 is provided between the support substrate 11 and the piezoelectric layer 12. At least a part of the functional electrode 14 overlaps the hollow portion 13 when viewed from a stacking direction of the support substrate 11 and the piezoelectric layer 12. A through hole 19 extends through the piezoelectric layer 12 to the hollow portion 13. A protrusion 20 extending along the depth direction of the through hole 19 is provided on an inner wall 19b of the through hole 19.
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Inventors:
KIMURA TETSUYA (JP)
INOUE KAZUNORI (JP)
SUZUKI KATSUMI (JP)
INOUE KAZUNORI (JP)
SUZUKI KATSUMI (JP)
Application Number:
PCT/JP2022/015392
Publication Date:
October 06, 2022
Filing Date:
March 29, 2022
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/17; H03H9/145; H03H9/25
Foreign References:
| JP2004072719A | 2004-03-04 | |||
| JP2007208728A | 2007-08-16 | |||
| JP2019009671A | 2019-01-17 |
Attorney, Agent or Firm:
WISEPLUS IP FIRM (JP)
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