FILM BULK ACOUSTIC RESONATOR AND MANUFACTURING METHOD THEREFOR, AND FILTER AND RADIO-FREQUENCY COMMUNICATION SYSTEM

WIPO Patent Application WO/2021/012917

A1

The present invention provides a film bulk acoustic resonator and a manufacturing method therefor, and a filter and a radio-frequency communication system. The film bulk acoustic resonator comprises: a first substrate; a support layer provided on the first substrate, a cavity with a top opening being formed in the support layer; a piezoelectric laminate covering the cavity; and at least two grooves distributed at a junction of a valid resonance zone and an invalid resonance zone for defining the range of the valid resonance zone. The grooves comprise a first groove and a second groove. The second groove passes through a second electrode and a piezoelectric layer, and the first groove passes through a first electrode and the piezoelectric layer and is communicated with the cavity. According to the film bulk acoustic resonator, at least one first groove and at least one second groove are provided in the piezoelectric laminate, and the first groove and the second groove effectively block the propagation of transverse wave in the invalid resonance zone. Further, electrode patterning effectively reduces spurious resonance, improves sound waves loss, and further increases the quality factor of the film bulk acoustic resonator.

SUI HUAN (CN)
QI FEI (CN)
YANG GUOHUANG (CN)

PCT/CN2020/099647

January 28, 2021

July 01, 2020

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NINGBO SEMICONDUCTOR INT CORP (CN)

H03H9/17

CN109831172A	2019-05-31
GB2282260A	1995-03-29
CN103873010A	2014-06-18
CN109309483A	2019-02-05
CN104038177A	2014-09-10
US20180048281A1	2018-02-15

BEIJING SICHUANG DACHENG INTELLECTUAL PROPERTY AGENCY CO., LTD. (CN)

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