Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/017780
Kind Code:
A1
Abstract:
Provided is an elastic wave device that is not prone to deterioration of device characteristics. The elastic wave device 1 has: a silicon nitride membrane 7 provided upon a piezoelectric layer 6; and an IDT electrode 8 provided upon the silicon nitride membrane 7. The IDT electrode 8 has a metal layer 8a comprising Cu or a Cu alloy. The refractive index of the silicon nitride membrane 7 is at least 2.15 and the thickness of the silicon nitride membrane 7 is 10–75 nm,
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Inventors:
HAYASHI YASUNOBU (JP)
Application Number:
PCT/JP2022/029970
Publication Date:
February 16, 2023
Filing Date:
August 04, 2022
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/25
Domestic Patent References:
| WO2020175234A1 | 2020-09-03 | |||
| WO2021060513A1 | 2021-04-01 |
Foreign References:
| JP2008078739A | 2008-04-03 | |||
| JP2005530924A | 2005-10-13 | |||
| JP6819834B1 | 2021-01-27 | |||
| JP2011114826A | 2011-06-09 | |||
| JP2019145886A | 2019-08-29 |
Attorney, Agent or Firm:
OSAKA FRONT (JP)
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