Title:
ELECTRET ELEMENT, MICROPHONE EQUIPPED WITH SAID ELECTRET ELEMENT, AND METHOD FOR MANUFACTURING SAID ELECTRET ELEMENT
Document Type and Number:
WIPO Patent Application WO/2016/063767
Kind Code:
A1
Abstract:
This electret element has an electret layer including silicon oxide, and an aluminum oxide protective layer deposited on the electret layer by means of an atomic layer deposition method.
Inventors:
HASHIGUCHI GEN (JP)
NISHIMORI YUKI (JP)
ARIOKA SHINICHI (JP)
SUZUKI MASATO (JP)
ISHIBASHI KAZUNORI (JP)
NISHIMORI YUKI (JP)
ARIOKA SHINICHI (JP)
SUZUKI MASATO (JP)
ISHIBASHI KAZUNORI (JP)
Application Number:
PCT/JP2015/079018
Publication Date:
April 28, 2016
Filing Date:
October 14, 2015
Export Citation:
Assignee:
UNIV SHIZUOKA NAT UNIV CORP (JP)
AOI ELECTRONICS CO LTD (JP)
SAGINOMIYA SEISAKUSHO INC (JP)
AOI ELECTRONICS CO LTD (JP)
SAGINOMIYA SEISAKUSHO INC (JP)
International Classes:
H01G7/02; H04R19/01
Foreign References:
| JP2009164539A | 2009-07-23 | |||
| JP2013235978A | 2013-11-21 | |||
| JP2014050196A | 2014-03-17 |
Attorney, Agent or Firm:
NAGAI, Fuyuki (JP)
Fuyuki Nagai (JP)
Fuyuki Nagai (JP)
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