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Title:
ELECTRICAL CONNECTION APPARATUS
Document Type and Number:
WIPO Patent Application WO/2018/190194
Kind Code:
A1
Abstract:
The present invention is provided with: probes (10); and a probe head (20) having a top part (21) through which the probes (10) penetrate, a bottom part (23) disposed further toward distal-end parts than the top part (21) and through which the probes (10) penetrate, and an upper guide part (24) and a lower guide part (25) disposed between the top part (21) and the bottom part (23) and through which the probes (10) penetrate; the probes (10) being retained in a curved state between the top part (21) and the bottom part (23), the probes (10) buckling due to contact of the distal-end parts with an inspection object (2), and at least portions of the probes (10) continuing from portions thereof where the probes (10) in the buckled state penetrate through the bottom part (23) to portions thereof where the probes (10) penetrate through the lower guide part (25) being high-rigidity portions (101) having higher rigidity than the buckling portions of the probes (10).

Inventors:
HAYASHIZAKI TAKAYUKI (JP)
NARITA HISAO (JP)
Application Number:
PCT/JP2018/014247
Publication Date:
October 18, 2018
Filing Date:
April 03, 2018
Export Citation:
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Assignee:
NIHON MICRONICS KK (JP)
International Classes:
G01R1/073; H01L21/66
Domestic Patent References:
WO2014087906A12014-06-12
WO2004072661A12004-08-26
WO2010095521A12010-08-26
Foreign References:
JP2002202337A2002-07-19
JP2012173263A2012-09-10
JPH10300786A1998-11-13
Attorney, Agent or Firm:
MIYOSHI Hidekazu et al. (JP)
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