ELECTRICALLY CONDUCTIVE CORROSION-RESISTANT MEMBER, ELECTRICALLY CONDUCTIVE CORROSION-RESISTANT COMPONENT, AND METHOD FOR MANUFACTURING ELECTRICALLY CONDUCTIVE CORROSION-RESISTANT MEMBER

WIPO Patent Application WO/2015/083552

A1

　Provided are an electrically conductive corrosion-resistant member which, when applied in members of various types for use in semiconductor production apparatuses, has high versatility and high electrical conductivity, as well as resistance to halogen-based corrosive gases and plasmas thereof, and high mechanical strength and thermal shock resistance; an electrically conductive corrosion-resistant component; and a method for manufacturing the electrically conductive corrosion-resistant member. This electrically conductive corrosion-resistant member is at least partially exposed to a halogen-based corrosive gas and/or a plasma thereof, and comprises a sintered compact containing: yttrium oxide particle units, or metal composite oxide particles that are a composite of two or more oxides selected from the group comprising yttrium oxide, aluminum oxide, and rare earth oxides; and filamentous carbon. The diameter of the filamentous carbon is greater than 50 nm but not more than 300 nm, and the length thereof is no more than 25 μm. The relative density of the sintered compact is 97% or more of the theoretical density thereof.

HAYASHI SHINTARO (JP)
TAKAHASHI KENTARO (JP)

PCT/JP2014/080757

June 11, 2015

November 20, 2014

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SUMITOMO OSAKA CEMENT CO LTD (JP)

C04B35/50; C04B35/80; C23C16/44; H01L21/3065

WO2011099466A1	2011-08-18
WO2006112485A1	2006-10-26

JP2005041765A	2005-02-17
JP2013224226A	2013-10-31

SHIGA Masatake et al. (JP)
Masatake Shiga (JP)

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