ELECTRO-ACTIVE DEVICE USING RADIAL ELECTRIC FIELD PIEZO-DIAPHRAGM FOR CONTROL OF FLUID MOVEMENT

WIPO Patent Application WO2003079409

A3

A fluid-control electro-active device (100) includes a piezo-diaphragm (10) made from a ferroelectric material sandwiched by first and second electrode patterns configured to introduce an electric field into the ferroelectric material when voltage (102) is applied thereto. The electric field originates at a region of the ferroelectric material between the first and second electrode patterns, and extends radially outward from this region of the ferroelectric material and substantially parallel to the plane of the ferroelectric material. The piezo-diaphragm (10) deflects symmetrically about this region in a direction substantially perpendicular to the electric field. An annular region (30) coupled to and extending radially outward from the piezo-diaphragm (10) perimetrically borders the piezo-diaphragm (10). A housing (40) is connected to the annular region (30) and defines at least one fluid flow path (50) therethrough with the piezo-diaphragm (10) disposed therein.

JP2019044768	FLUID CONTROL DEVICE OF MICRO-ELECTROMECHANICAL SYSTEM
WO/2020/083736	SEALED PERISTALTIC PUMP FOR HOUSEHOLD ELECTRIC APPLIANCE

BRYANT ROBERT G (US)
WORKING DENNIS C (US)

PCT/US2003/007569

May 13, 2004

March 13, 2003

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NASA (US)
BRYANT ROBERT G (US)
WORKING DENNIS C (US)

F04B43/09; H02N2/04; (IPC1-7): H01L41/047; H01L41/053; H02N2/04

WO1987007218A1

1987-12-03

US6265811B1	2001-07-24
US5862275A	1999-01-19
US5852337A	1998-12-22
US6323580B1	2001-11-27
US6285116B1	2001-09-04
US4379246A	1983-04-05
US3857049A	1974-12-24
US2963597A	1960-12-06

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