Title:
ELECTRODE FOR GENERATING PLASMA, ELEMENT FOR BURYING ELECTRODE, AND METHOD FOR MANUFACTURING THE ELECTRODE AND THE ELEMENT
Document Type and Number:
WIPO Patent Application WO/1995/014308
Kind Code:
A1
Abstract:
This apparatus comprises a substrate (31) made of fine ceramic, and an electrode (55) buried in the substrate (31) and electrically insulated in it, wherein a plasma is produced on the substrate. The apparatus includes a layer (37) permeable to electromagnetic waves, and preferably, the average thickness of the layer is 0.5 mm or more. The electrode (55) is a flat electrode formed by a bulk metal. The substrate which encloses the electrode is a product integrally formed by sintering without junctions. This structure can also be utilized for an electric dust collector, an electromagnetic shielding device, and an electrostatic chuck. These devices can be preferably installed in an apparatus using a corrosive halogen gas for fabricating semiconductors or the like. A compact, together with a flat bulk metal electrode, is sintered by a hot press with a pressure in the thickness direction of the electrode in such a manner that the electrode is buried integrally in a fine ceramic substrate without junctions. A material permeable to electromagnetic waves is used for an apparatus for generating plasma by applying a high-frequency power to a gas. At least the surface of this material, which is in contact with the plasma atmosphere, is made of the aluminum nitride whose dielectric loss tan'delta' is 10-2 or less, and thermal resistance shock 'DELTA'Tc is 300� or more.
Inventors:
NIORI YUSUKE (JP)
UMEMOTO KOICHI (JP)
USHIKOSHI RYUSUKE (JP)
UMEMOTO KOICHI (JP)
USHIKOSHI RYUSUKE (JP)
Application Number:
PCT/JP1994/001063
Publication Date:
May 26, 1995
Filing Date:
June 30, 1994
Export Citation:
Assignee:
NGK INSULATORS LTD (JP)
NIORI YUSUKE (JP)
UMEMOTO KOICHI (JP)
USHIKOSHI RYUSUKE (JP)
NIORI YUSUKE (JP)
UMEMOTO KOICHI (JP)
USHIKOSHI RYUSUKE (JP)
International Classes:
H01J37/32; (IPC1-7): H01L21/205
Foreign References:
| JPH03255625A | 1991-11-14 | |||
| JPH01200625A | 1989-08-11 | |||
| JPH03255626A | 1991-11-14 | |||
| JPH03194948A | 1991-08-26 | |||
| JPH0434953A | 1992-02-05 | |||
| JPH04304941A | 1992-10-28 | |||
| JPS61171128A | 1986-08-01 |
Other References:
See also references of EP 0680075A4
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