Title:
ELECTROMAGNET UNIT, MAGNETIC BEARING DEVICE, AND VACUUM PUMP
Document Type and Number:
WIPO Patent Application WO/2017/006844
Kind Code:
A1
Abstract:
[Problem] To provide an electromagnet unit, a magnetic bearing device, and a vacuum pump in which radial displacement of a rotating body is detected with precision. [Solution] An upper electromagnet unit (61) is provided with a radial electromagnet (63) for supporting a rotor (20) in the radial direction (R) without contact, a radial sensor (64) for detecting displacement of the rotor (20) in the radial direction (R), and a core (65) around which a coil (63a) and a coil (64a) are wound. Two radial electromagnets (63, 63), which are adjacent in the circumferential direction (C) of the core (65), are disposed so that adjacent magnetic poles (66, 66) are homopolar with each other in the two radial electromagnets (63, 63), and a low magnetic flux interference area (m) is formed between the two radial electromagnets (63, 63). The radial sensor (64) is disposed within the low magnetic flux interference area (m).
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Inventors:
KAWASHIMA TOSHIAKI (JP)
Application Number:
PCT/JP2016/069573
Publication Date:
January 12, 2017
Filing Date:
July 01, 2016
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
F16C32/04; F04D19/04
Foreign References:
| JP2002199655A | 2002-07-12 | |||
| JPH0333219U | 1991-04-02 | |||
| JPH09137828A | 1997-05-27 | |||
| JP2005076792A | 2005-03-24 | |||
| JP2003148468A | 2003-05-21 | |||
| JP2001056026A | 2001-02-27 |
Other References:
See also references of EP 3321528A4
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