Title:
ELECTROMAGNETIC WAVE MEASURING APPARATUS, MEASURING METHOD, PROGRAM AND RECORDING MEDIUM
Document Type and Number:
WIPO Patent Application WO/2010/131763
Kind Code:
A1
Abstract:
An electromagnetic wave measuring apparatus comprises: an electromagnetic wave detector (4) that outputs electromagnetic waves and detects electromagnetic waves having passed through a measured object (1); a scanning stage (6) that changes the relative position of an intersection part (100), where the measured object (1) intersects the optical path of the electromagnetic waves passing through the measured object (1), relative to the measured object (1); an attenuation rate deriving unit (12) that derives an attenuation rate of electromagnetic waves based on a detection result of the electromagnetic wave detector (4) in association with an assumed relative position that is the relative position in the case of assuming that there is no refraction of electromagnetic waves caused by the measured object (1); a measurement point correcting unit (14) that changes the assumed relative position to a real relative position that is the relative position in the case of taking into account the refraction of electromagnetic waves caused by the measured object (1), thereby associating the derivation result of the attenuation rate deriving unit (12) with the real relative position; and a corrected attenuation rate deriving unit (16) that derives, based on an output from the measurement point correcting unit (14), an attenuation rate associated with a given relative position.
Inventors:
NISHINA SHIGEKI (JP)
IMAMURA MOTOKI (JP)
IRISAWA AKIYOSHI (JP)
YAMASHITA TOMOYU (JP)
KATO EIJI (JP)
KAWASE KODO (JP)
IMAMURA MOTOKI (JP)
IRISAWA AKIYOSHI (JP)
YAMASHITA TOMOYU (JP)
KATO EIJI (JP)
KAWASE KODO (JP)
Application Number:
PCT/JP2010/058254
Publication Date:
November 18, 2010
Filing Date:
May 11, 2010
Export Citation:
Assignee:
ADVANTEST CORP (JP)
NISHINA SHIGEKI (JP)
IMAMURA MOTOKI (JP)
IRISAWA AKIYOSHI (JP)
YAMASHITA TOMOYU (JP)
KATO EIJI (JP)
KAWASE KODO (JP)
NISHINA SHIGEKI (JP)
IMAMURA MOTOKI (JP)
IRISAWA AKIYOSHI (JP)
YAMASHITA TOMOYU (JP)
KATO EIJI (JP)
KAWASE KODO (JP)
International Classes:
G01B15/04; G01N21/35; G01N21/17
Foreign References:
| JP2008116439A | 2008-05-22 | |||
| JP2004286716A | 2004-10-14 | |||
| JP2009056140A | 2009-03-19 |
Other References:
WANG S. ET AL: "Pulsed terahertz tomography", JOURNAL OF PHYSICS D-APPLIED PHYSICS, vol. 37, no. 21, February 2004 (2004-02-01), pages R1 - R36
Attorney, Agent or Firm:
HOSODA, Masutoshi (JP)
Masunori Hosoda (JP)
Masunori Hosoda (JP)
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Claims: