Title:
ELECTRON GUN AND CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2013/027448
Kind Code:
A1
Abstract:
The objective of the present invention is to suppress the occurrence of flares and to reduce the amount of secondary electrons arising at an aperture provided to the lead-out electrode of an electron gun. By coating a thin film having a low rate of secondary electron emission such as carbon onto the aperture (7A) of a lead-out electrode (5) closest to an electron source (1) in an electron gun, it is possible to reduce the amount of secondary electrons arising. Secondary electrons arising at the lead-out electrode (5), which are the cause of flare arising, are reduced, and so as a result, flare is reduced. Also, by means of incorporating two apertures (7A, 7B) to the lead-out electrode (5), and applying to the two apertures a potential that is equipotential to the lead-out electrode (5), it is possible to eliminate an electric field from seeping from under to over the lead-out electrode (5). As a result, secondary electrons arising when an electron beam impacts the lead-out electrode (5) cease to incur force in the direction of passage from the lead-out electrode (5), and consequently there is a reduction in flares.
Inventors:
WATANABE SHUN-ICHI (JP)
ONISHI TAKASHI (JP)
OSE YOICHI (JP)
NAKAMURA KUNIYASU (JP)
MORIYAMA MASARU (JP)
SUZUKI TOMONORI (JP)
ONISHI TAKASHI (JP)
OSE YOICHI (JP)
NAKAMURA KUNIYASU (JP)
MORIYAMA MASARU (JP)
SUZUKI TOMONORI (JP)
Application Number:
PCT/JP2012/063017
Publication Date:
February 28, 2013
Filing Date:
May 22, 2012
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
WATANABE SHUN-ICHI (JP)
ONISHI TAKASHI (JP)
OSE YOICHI (JP)
NAKAMURA KUNIYASU (JP)
MORIYAMA MASARU (JP)
SUZUKI TOMONORI (JP)
WATANABE SHUN-ICHI (JP)
ONISHI TAKASHI (JP)
OSE YOICHI (JP)
NAKAMURA KUNIYASU (JP)
MORIYAMA MASARU (JP)
SUZUKI TOMONORI (JP)
International Classes:
H01J37/073; H01J37/09
Foreign References:
| JP2008117662A | 2008-05-22 | |||
| JPH09204891A | 1997-08-05 | |||
| JP2007250491A | 2007-09-27 | |||
| JP2008052935A | 2008-03-06 | |||
| JP2009037966A | 2009-02-19 | |||
| JP2010003596A | 2010-01-07 | |||
| JP2009194252A | 2009-08-27 | |||
| JP2008204675A | 2008-09-04 | |||
| JP2004273365A | 2004-09-30 |
Attorney, Agent or Firm:
POLAIRE I. P. C. (JP)
Polaire Intellectual Property Corporation (JP)
Polaire Intellectual Property Corporation (JP)
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