Title:
ELECTROSTATIC CHUCK CAPABLE OF RAPIDLY DECHUCKING A SUBSTRATE
Document Type and Number:
WIPO Patent Application WO1999029001
Kind Code:
A3
Abstract:
An electrostatic chuck (20) for holding a substrate (12) comprises a dielectric (70) having a receiving surface (75) for receiving the substrate thereon. The dielectric (70) comprises a charging electrode (80) for generating electrostatic charge for electrostatically holding the substrate (12) to the receiving surface (75), and a discharge electrode (85) electrically isolated from the charging electrode for removing electrostatic charge accumulated in the chuck (20).
Inventors:
KUMAR ANANDA H
SHAMOUILIAN SHAMOUIL
SHAMOUILIAN SHAMOUIL
Application Number:
PCT/US1998/025353
Publication Date:
September 02, 1999
Filing Date:
November 24, 1998
Export Citation:
Assignee:
APPLIED MATERIALS INC (US)
International Classes:
B23Q3/15; B25J15/06; H01L21/683; H02N13/00; (IPC1-7): H01L21/68
Foreign References:
| US5179498A | 1993-01-12 | |||
| EP0806834A2 | 1997-11-12 | |||
| US5684669A | 1997-11-04 | |||
| EP0692814A1 | 1996-01-17 | |||
| US5325261A | 1994-06-28 | |||
| GB2293689A | 1996-04-03 |
Other References:
PATENT ABSTRACTS OF JAPAN vol. 017, no. 032 (E - 1309) 21 January 1993 (1993-01-21)
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