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Title:
ELECTROSTATIC CHUCK
Document Type and Number:
WIPO Patent Application WO/2015/076369
Kind Code:
A1
Abstract:
An electrostatic chuck according to one embodiment of the present invention is for clamping a target object thereto and is provided with a bottom surface and a base having a first surface that comprises a protruding surface section that protrudes from the bottom surface. The protruding surface section comprises a first top surface and a stepped surface that is arranged between the first top surface and the bottom surface.

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Inventors:
HORIUCHI MASAHIKO (JP)
Application Number:
PCT/JP2014/080908
Publication Date:
May 28, 2015
Filing Date:
November 21, 2014
Export Citation:
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Assignee:
KYOCERA CORP (JP)
International Classes:
H01L21/683; B23Q3/15; H02N13/00
Foreign References:
JP2011199303A2011-10-06
JP2004022889A2004-01-22
JP2010010695A2010-01-14
JP2011082579A2011-04-21
JP2001219332A2001-08-14
Other References:
See also references of EP 3073521A4
Download PDF:
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