Title:
ELECTROSTATIC CHUCK
Document Type and Number:
WIPO Patent Application WO/2022/202147
Kind Code:
A1
Abstract:
This electrostatic chuck has a ceramic substrate, a base plate, and an embedded member. The ceramic substrate has: a first surface on which an object to be treated is placed; a second surface positioned opposite to the first surface; and a first flow passage passing through the first surface and the second surface. The base plate is joined to the second surface of the ceramic substrate and has a through-hole at a position corresponding to at least the first flow passage. The embedded member is positioned inside the through-hole, and has a porous body facing the first flow passage and a second flow passage in communication with the first flow passage via the porous body. The first flow passage and the second flow passage are positioned to be spaced apart from each other when viewed in a plan view.
Inventors:
AKABANE KENICHI (JP)
Application Number:
PCT/JP2022/008593
Publication Date:
September 29, 2022
Filing Date:
March 01, 2022
Export Citation:
Assignee:
KYOCERA CORP (JP)
International Classes:
H02N13/00; H01L21/683
Domestic Patent References:
| WO2020153449A1 | 2020-07-30 |
Foreign References:
| JP2013232640A | 2013-11-14 | |||
| JP2013243267A | 2013-12-05 | |||
| JP2014209615A | 2014-11-06 | |||
| JP2005268654A | 2005-09-29 |
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (JP)
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