ELEMENT MANUFACTURING METHOD AND ELEMENT MANUFACTURING APPARATUS

WIPO Patent Application WO/2014/157657

A1

[Problem] To provide an element manufacturing method and an element manufacturing apparatus for efficiently manufacturing elements. [Solution] First, an intermediate product (50), which includes a substrate (41) and protrusions (44) that extend in the normal direction of the substrate (41), is prepared. Next, in a lamination chamber (20a) adjusted to a vacuum environment, a laminate (51) is formed by continuously laminating a lid material (25) on the intermediate product (50), from the side of the protrusions (44). Then, the laminate (51) is conveyed from the lamination chamber (20a) to a first pressure chamber (21a) adjusted to a first pressure, which is higher than the pressure in the vacuum environment. Next, the laminate (51) is conveyed from the first pressure chamber (21a) to a separation chamber (22a), which is adjusted to a vacuum environment, and the laminate (51) is separated into the intermediate product (50) and the lid material (25). In a cross section of the laminate (51) when the laminate (51) has been virtually cut by a plane orthogonal to the direction in which the laminate (51) is conveyed, the space between the intermediate product (50) and the lid material (25) is sealed from the surroundings.

NIRENGI TAKAYOSHI (JP)
TAKEDA TOSHIHIKO (JP)
NAKAJIMA HIROYOSHI (JP)

PCT/JP2014/059264

October 02, 2014

March 28, 2014

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DAINIPPON PRINTING CO LTD (JP)

H05B33/10; H01L51/50; H05B33/02; H05B33/12; H05B33/22; H05B33/26

WO2010090223A1

2010-08-12

JP2008288074A	2008-11-27
JP2007052966A	2007-03-01
JP2006309994A	2006-11-09
JP2000109173A	2000-04-18
JPH09142569A	1997-06-03

KATSUNUMA Hirohito et al. (JP)
Katsunuma Hirohito (JP)

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