Title:
ELEMENT MANUFACTURING METHOD AND ELEMENT MANUFACTURING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2014/157658
Kind Code:
A1
Abstract:
[Problem] To provide an element manufacturing method and an element manufacturing apparatus for efficiently manufacturing elements. [Solution] First, an intermediate product (50), which includes a substrate (41) and protrusions (44) that extend in the normal direction of the substrate (41), is formed. Next, the intermediate product (50) is covered using a first surface (21d) of a lid material (21c) on the side of the protrusions (44). Then, gas is injected in a sealed space (28) formed on a second surface (21e) side of the lid material (21c), which is on the opposite side of the first surface (21d), so as to increase the pressure in the sealed space (28), thus bringing the first surface (21d) of the lid material (21c) into close contact with the intermediate product (50).
Inventors:
NIRENGI TAKAYOSHI (JP)
TAKEDA TOSHIHIKO (JP)
NAKAJIMA HIROYOSHI (JP)
TAKEDA TOSHIHIKO (JP)
NAKAJIMA HIROYOSHI (JP)
Application Number:
PCT/JP2014/059265
Publication Date:
October 02, 2014
Filing Date:
March 28, 2014
Export Citation:
Assignee:
DAINIPPON PRINTING CO LTD (JP)
International Classes:
H05B33/10; H01L51/05; H01L51/40; H01L51/50; H05B33/02; H05B33/12; H05B33/26
Foreign References:
| JP2008288074A | 2008-11-27 | |||
| JP2006179465A | 2006-07-06 | |||
| JPH11185956A | 1999-07-09 |
Attorney, Agent or Firm:
KATSUNUMA Hirohito et al. (JP)
Katsunuma Hirohito (JP)
Katsunuma Hirohito (JP)
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