Title:
ENERGY DEGRADER, CHARGED PARTICLE BEAM EMISSION SYSTEM PROVIDED WITH SAME, AND METHOD OF PRODUCING GRAPHITE FILM
Document Type and Number:
WIPO Patent Application WO/2017/094802
Kind Code:
A1
Abstract:
Provided is an energy degrader having a degrading member which becomes less radioactive than known degrading members. This degrading member (11) is a graphite film. The thermal conductivity of the graphite film in the film surface direction is 1200 W/(m·K) or more, and the thickness of the graphite film is in the range of 0.1 μm to 50 μm inclusive.
Inventors:
MURAKAMI MUTSUAKI (JP)
TATAMI ATSUSHI (JP)
TACHIBANA MASAMITSU (JP)
TATAMI ATSUSHI (JP)
TACHIBANA MASAMITSU (JP)
Application Number:
PCT/JP2016/085624
Publication Date:
June 08, 2017
Filing Date:
November 30, 2016
Export Citation:
Assignee:
KANEKA CORP (JP)
International Classes:
G21K3/00; A61N5/10; C01B32/205; G21K5/04
Domestic Patent References:
| WO2015045641A1 | 2015-04-02 |
Foreign References:
| JP2012249940A | 2012-12-20 | |||
| JP2013238515A | 2013-11-28 | |||
| JP2011063509A | 2011-03-31 | |||
| JP2008194441A | 2008-08-28 | |||
| JPH0421508A | 1992-01-24 |
Other References:
See also references of EP 3385956A4
Attorney, Agent or Firm:
HARAKENZO WORLD PATENT & TRADEMARK (JP)
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