Title:
ENVIRONMENT MONITORING SYSTEM
Document Type and Number:
WIPO Patent Application WO/2022/057386
Kind Code:
A1
Abstract:
An environment monitoring system, for monitoring the concentration of air pollutants in a plurality of process areas (10) in a clean room. Said system comprises: a sampling device, for acquiring environment samples of the process areas (10), the sampling device comprising a system sampling pipeline (114), and the environment samples comprising air; an analyzing device (12), in communication with an output end of the system sampling pipeline (114); a gas supply device (13), in communication with the system sampling pipeline (114) and for supplying a purging gas to the system sampling pipeline (114); and a humidifying device (14), for supplying water mist, the humidifying device (14) being in communication between the gas supply device (13) and the system sampling pipeline (114). Said system facilitates quick cleaning of residual pollutants in a pipeline, shortens the cleaning time of the pipeline, speeds up the sampling cycle time of the system, increases the sampling frequency of the system, and improves the accuracy of gas pollutant data obtained by sampling and analyzing.
Inventors:
WANG XUBAO (CN)
DING YUNXIAO (CN)
DING YUNXIAO (CN)
Application Number:
PCT/CN2021/103861
Publication Date:
March 24, 2022
Filing Date:
June 30, 2021
Export Citation:
Assignee:
CHANGXIN MEMORY TECH INC (CN)
International Classes:
G01N1/22; G01N15/06
Foreign References:
| CN203837974U | 2014-09-17 | |||
| CN106198119A | 2016-12-07 | |||
| CN105784557A | 2016-07-20 | |||
| CN109557007A | 2019-04-02 | |||
| JP2000321180A | 2000-11-24 | |||
| EP1196832A2 | 2002-04-17 |
Attorney, Agent or Firm:
CHINA PAT INTELLECTUAL PROPERTY OFFICE (CN)
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