Title:
EVACUATION DEVICE AND VACUUM PUMP USED IN SAME
Document Type and Number:
WIPO Patent Application WO/2021/112021
Kind Code:
A1
Abstract:
Provided are an evacuation device capable of controlling the pressure in a chamber to be evacuated accurately and at high speed, and a vacuum pump used in the same. The evacuation device is provided with: a vacuum pump (1) including a rotor and a casing having an intake opening, the rotor rotating to evacuate the interior of a chamber to be evacuated (4); a valve (2) disposed between the intake opening of the vacuum pump (1) and an exhaust opening of the chamber to be evacuated; and a control device (3) which controls the pressure in the chamber to be evacuated (4) to match a target value. The control device (3) adjusts the opening angle of the valve (2) when the absolute value of the difference between the pressure in the chamber to be evacuated (4) and the target value is greater than a predetermined value, or adjusts the rotational speed of the rotor of the vacuum pump (1) when the absolute value of the difference between the pressure in the chamber to be evacuated (4) and the target value is less than the predetermined value.
Inventors:
OHTACHI YOSHINOBU (JP)
MAEJIMA YASUSHI (JP)
TAKAADA TSUTOMU (JP)
MAEJIMA YASUSHI (JP)
TAKAADA TSUTOMU (JP)
Application Number:
PCT/JP2020/044377
Publication Date:
June 10, 2021
Filing Date:
November 27, 2020
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
F04D19/04; F04B49/06; F04B49/22; F04D27/00
Foreign References:
| JP2018204448A | 2018-12-27 | |||
| JP2019070924A | 2019-05-09 | |||
| JP2014148703A | 2014-08-21 |
Other References:
See also references of EP 4071363A4
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