Title:
EXHAUST GAS TREATMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/090737
Kind Code:
A1
Abstract:
[Problem] To provide an exhaust gas treatment device wherein a powder accumulated in or adhered to a pipe, into which an exhaust gas discharged from a process chamber is introduced, is able to be easily removed without taking apart the pipe. [Solution] According to the present invention, a pipe wall of an exhaust gas feed pipe 7 is provided with a jet orifice 53; and a nozzle 54 is fitted to the jet orifice 53. An inert gas such as a nitrogen gas is introduced from the nozzle 54 into the exhaust gas feed pipe 7 at a flow rate that is not less than a predetermined rate. In order to remove a powder accumulated in or adhered to the pipe, a combustion type detoxifying apparatus 10 is stopped firstly, and a three-way selector valve 60 is switched to the bypass side. It is preferable that the jet orifice 53 is positioned as far upstream as possible in the exhaust gas feed pipe 7, so that the nitrogen gas is jetted toward the downstream side by means of the nozzle 54. By flowing the nitrogen gas at a flow rate of 10 m/second or more for about 30 seconds, a powder adhering to the inner wall of the pipe can be surely blown off.
Inventors:
TAKAHASHI KATSUNORI (JP)
Application Number:
PCT/JP2020/040331
Publication Date:
May 14, 2021
Filing Date:
October 27, 2020
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
H01L21/3065; C23C16/44; F23J3/02; H01L21/31
Foreign References:
| JP2002011341A | 2002-01-15 | |||
| JP2006303414A | 2006-11-02 | |||
| JPH11345806A | 1999-12-14 |
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