Title:
VACUUM PUMP
Document Type and Number:
WIPO Patent Application WO/2021/090738
Kind Code:
A1
Abstract:
Provided is a vacuum pump that has a thread groove and can suppress precipitation and accumulation of by-products in a flow path downstream of the thread groove. The vacuum pump (1) has: a casing (11) having an intake port (12) or an exhaust port (21); a rotor (32) including a plurality of rotor blades (32) and a rotor cylindrical part (33); a drive part (80); a bearing; a stator blade (43); a thread groove stator (50) disposed downstream of the stator blade (43) and having an inner peripheral surface facing an outer peripheral surface of the rotor cylindrical part (33); and a heat insulation wall (90) located downstream of the thread groove (51). The heat insulation wall (90) has: an annular part (92) having a ring shape; and a substantially cylindrical wall part (93) extending from a radially inner portion of the annular part (92) to the upstream side to form a flow path on an outer peripheral surface side. A first corner part (97) is formed between the upstream-side surface of the annular part (92) and the outer peripheral surface of the wall part (93), and the first corner part (97) is formed in an arc shape.
Inventors:
TAKAI YOSHIYUKI (JP)
MIWATA TOORU (JP)
MIWATA TOORU (JP)
Application Number:
PCT/JP2020/040332
Publication Date:
May 14, 2021
Filing Date:
October 27, 2020
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
F04D19/04
Domestic Patent References:
| WO2019188732A1 | 2019-10-03 |
Foreign References:
| JP2004270692A | 2004-09-30 | |||
| JPH10306789A | 1998-11-17 | |||
| JP2019090384A | 2019-06-13 |
Other References:
See also references of EP 4056855A4
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