Title:
EXPOSURE APPARATUS, FLAT-PANEL DISPLAY PRODUCTION METHOD, AND DEVICE PRODUCTION METHOD
Document Type and Number:
WIPO Patent Application WO/2020/203137
Kind Code:
A1
Abstract:
With a view to achieving apparatus downsizing (narrowing of footprint), this exposure apparatus (100) is provided with: an exposure apparatus body (10); a chamber (200) in which the exposure apparatus body is accommodated; a substrate retention part (160) which is disposed within the chamber (200) so as to receive and retain a substrate (P) that is brought over by an external transfer robot (300) located outside the chamber (200); and a substrate transfer device (140) which handles the transfer of the substrate (P) from the external transfer robot (300) to the substrate retention part (160), the transfer of the substrate (P) from the substrate retention part (160) onto a retention apparatus (28) installed in the exposure apparatus body (10), and the transfer of the substrate (P) from on top of the retention apparatus (28) to the external transfer robot (300).
Inventors:
AOKI YASUO (JP)
Application Number:
PCT/JP2020/010753
Publication Date:
October 08, 2020
Filing Date:
March 12, 2020
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
G03F7/20; H01L21/677
Domestic Patent References:
| WO2018062480A1 | 2018-04-05 | |||
| WO2018062483A1 | 2018-04-05 |
Foreign References:
| JP2012084825A | 2012-04-26 | |||
| JP2011228633A | 2011-11-10 | |||
| JP2012169691A | 2012-09-06 |
Attorney, Agent or Firm:
KATAYAMA, Shuhei (JP)
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