Title:
EXPOSURE PELLICLE FILM, PELLICLE, EXPOSURE ORIGINAL, EXPOSURE DEVICE, AND METHOD FOR MANUFACTURING EXPOSURE PELLICLE FILM
Document Type and Number:
WIPO Patent Application WO/2021/210432
Kind Code:
A1
Abstract:
An exposure pellicle film includes a carbon nanotube film, the carbon nanotube film containing carbon nanotubes, the carbon nanotube film having an EUV light transmittance of 80% or above at a wavelength of 13.5 nm, and the carbon nanotube film having a thickness of 1-50 nm inclusive. When the carbon nanotube film is positioned on a silicon substrate and the reflectance of the positioned carbon nanotube film is measured under the following conditions using a reflection spectroscopic film thickness gauge, 3σ of the reflectance is 15% or below. Diameter of measurement points: 20 μm; reference measurement wavelength: wavelength 285 nm; number of measurement points: 121; distance between center points of adjacent measurement points: 40 μm
Inventors:
ONO YOUSUKE (JP)
ISHIKAWA HISAKO (JP)
OGAWA RYOHEI (JP)
OKUBO ATSUSHI (JP)
KOHMURA KAZUO (JP)
SEKIGUCHI ATSUKO (JP)
KATO YUICHI (JP)
YAMADA TAKEO (JP)
ZHOU YING (JP)
ISHIKAWA HISAKO (JP)
OGAWA RYOHEI (JP)
OKUBO ATSUSHI (JP)
KOHMURA KAZUO (JP)
SEKIGUCHI ATSUKO (JP)
KATO YUICHI (JP)
YAMADA TAKEO (JP)
ZHOU YING (JP)
Application Number:
PCT/JP2021/014353
Publication Date:
October 21, 2021
Filing Date:
April 02, 2021
Export Citation:
Assignee:
MITSUI CHEMICALS INC (JP)
NAT INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHOLOGY (JP)
NAT INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHOLOGY (JP)
International Classes:
G03F1/62; G03F7/20
Domestic Patent References:
| WO2018008594A1 | 2018-01-11 | |||
| WO2018008594A1 | 2018-01-11 |
Foreign References:
| JP2019168502A | 2019-10-03 | |||
| JP2018194838A | 2018-12-06 | |||
| JP2018194840A | 2018-12-06 | |||
| US20080152873A1 | 2008-06-26 | |||
| JP2020074343A | 2020-05-14 |
Other References:
PROC. OF SPIE, vol. 8886, pages 888604 - 1
T. NAKANISHIT. ANDO: "Optical Response of Finite-Length Carbon Nanotubes", J. PHYS. SOC. JAPAN, vol. 78, 2009, pages 114708
T. MORIMOTOS.K. JOUNGT. SAITOD.N. FUTABAK. HATAT. OKAZAKI: "Length-dependent plasmon resonance in single-walled carbon nanotubes", ACS NANO, vol. 8, 2014, pages 9897 - 9904
SAITO, J. NANOSCI. NANOTECHNOL., vol. 8, 2008, pages 6153 - 6157
See also references of EP 4120017A4
T. NAKANISHIT. ANDO: "Optical Response of Finite-Length Carbon Nanotubes", J. PHYS. SOC. JAPAN, vol. 78, 2009, pages 114708
T. MORIMOTOS.K. JOUNGT. SAITOD.N. FUTABAK. HATAT. OKAZAKI: "Length-dependent plasmon resonance in single-walled carbon nanotubes", ACS NANO, vol. 8, 2014, pages 9897 - 9904
SAITO, J. NANOSCI. NANOTECHNOL., vol. 8, 2008, pages 6153 - 6157
See also references of EP 4120017A4
Attorney, Agent or Firm:
TAIYO, NAKAJIMA & KATO (JP)
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