Title:
EXTERNAL APPEARANCE INSPECTION DEVICE AND INSPECTION SYSTEM
Document Type and Number:
WIPO Patent Application WO/2016/103622
Kind Code:
A1
Abstract:
An external appearance inspection device (10) for inspecting the external appearance of an object of inspection using a reflected light image formed by light reflected by the object of inspection is provided with: a light source unit (13) that is positioned opposite from a surface to be observed of the object of inspection and emits light toward the object of inspection; a half mirror (14) that is positioned on the side of the surface to be observed of the object of inspection, reflects the light emitted from the light source unit (13) toward the surface to be observed, and transmits the light reflected by the surface to be observed; and a light blocking body (15) that is disposed between the light source unit (13) and object of inspection and blocks all light from among the light emitted from the light source unit (13) that is emitted in a direction of direct irradiation onto the object of inspection. The light source unit (13) is the only light source for the light that forms the reflected light image and irradiates the emitted light onto the surface of the half mirror (14) opposing the object of inspection with a roughly even illuminance. The half mirror (14) does not have a hole or gap within the area that reflects the light emitted from the light source unit (13) toward the surface to be observed.
Inventors:
TSUDA AKINORI (JP)
Application Number:
PCT/JP2015/006221
Publication Date:
June 30, 2016
Filing Date:
December 14, 2015
Export Citation:
Assignee:
GOYO CO LTD (JP)
TSUDA AKINORI (JP)
TSUDA AKINORI (JP)
International Classes:
G01N21/958; G01M11/00; G01N21/84
Foreign References:
| JPH11242005A | 1999-09-07 | |||
| JP2004325071A | 2004-11-18 | |||
| JP2006214890A | 2006-08-17 | |||
| JP2013246059A | 2013-12-09 | |||
| JPH08201313A | 1996-08-09 |
Attorney, Agent or Firm:
NII, Hiromori (JP)
New house Extensive 守 (JP)
New house Extensive 守 (JP)
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