Title:
FERROELECTRIC TUNNEL JUNCTION DEVICE AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2023/070986
Kind Code:
A1
Abstract:
Provided in the embodiments of the present application are a ferroelectric tunnel junction device and a manufacturing method therefor. The ferroelectric tunnel junction device comprises a first electrode, a dielectric layer, a ferroelectric layer and a second electrode, which are sequentially stacked, wherein the thickness of the ferroelectric layer is less than five nanometers. The thickness of the ferroelectric layer is relatively thin, such that a relatively large tunneling current can be provided for the device, and the relatively thin ferroelectric layer can also increase depolarization field strength in the ferroelectric tunnel junction device, accelerate depolarization and reduce a data holding capability, so as to obtain a volatile data storage device. The volatile ferroelectric tunnel junction device can be applied to a reservoir computing network system. A plurality of polarization currents that are collected by the ferroelectric tunnel junction device during a running process are used as virtual nodes of a reservoir computing network system, and data can be input into the plurality of virtual nodes in parallel, that is, the data can be processed in parallel by the reservoir computing network system based on the ferroelectric tunnel junction device, such that the calculation of a neural network model is efficiently performed, and the requirement of the neural network model for efficient training is met.
Inventors:
XU XIAOXIN (CN)
YU JIE (CN)
GAO ZHAOMENG (CN)
SUN WENXUAN (CN)
ZHANG WOYU (CN)
LI YI (CN)
SHANG DASHAN (CN)
YU JIE (CN)
GAO ZHAOMENG (CN)
SUN WENXUAN (CN)
ZHANG WOYU (CN)
LI YI (CN)
SHANG DASHAN (CN)
Application Number:
PCT/CN2022/075627
Publication Date:
May 04, 2023
Filing Date:
February 09, 2022
Export Citation:
Assignee:
INST OF MICROELECTRONICS CAS (CN)
International Classes:
H01L45/00
Foreign References:
| CN113991015A | 2022-01-28 | |||
| CN113421885A | 2021-09-21 | |||
| CN103346255A | 2013-10-09 |
Attorney, Agent or Firm:
UNITALEN ATTORNEYS AT LAW (CN)
Download PDF: