Title:
FILM BULK ACOUSTIC RESONATOR AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2022/012438
Kind Code:
A1
Abstract:
The present invention relates to a film bulk acoustic resonator and a manufacturing method therefor. The film bulk acoustic resonator comprises: a first electrode, a piezoelectric layer and a second electrode which are stacked; an effective resonance area which comprises an area where the first electrode, the piezoelectric layer and the second electrode overlap with each other in a direction perpendicular to the surface of the piezoelectric layer, the area outside the effective resonance area being an ineffective area; a first dielectric layer, a first gap being provided between the upper surface of the first dielectric layer and a lower surface of the first electrode; a second dielectric layer, a second gap being provided between the lower surface of the second dielectric layer and an upper surface of the second electrode; a first conductive protrusion, one end of which is arranged on the lower surface of the first electrode, and the other end of which is connected to a first electrode lead-out part; and a second conductive protrusion, one end of which is arranged on the upper surface of the second electrode, and the other end of which is connected to a second electrode lead-out part. By means of the present invention, the quality factor of a resonator can be improved.
Inventors:
HUANG HERB HE (CN)
Application Number:
PCT/CN2021/105531
Publication Date:
January 20, 2022
Filing Date:
July 09, 2021
Export Citation:
Assignee:
NINGBO SEMICONDUCTOR INT CORP (CN)
International Classes:
H03H3/02; H03H9/02; H03H9/13; H03H9/17
Foreign References:
| CN106877836A | 2017-06-20 | |||
| CN110829997A | 2020-02-21 | |||
| CN107181470A | 2017-09-19 | |||
| CN111010127A | 2020-04-14 | |||
| CN110798160A | 2020-02-14 | |||
| US20200220514A1 | 2020-07-09 |
Attorney, Agent or Firm:
BEIJING SICHUANG DACHENG INTELLECTUAL PROPERTY AGENCY CO., LTD. (CN)
Download PDF: