Title:
FILM FORMING APPARATUS AND FILM FORMING METHOD
Document Type and Number:
WIPO Patent Application WO/2007/148536
Kind Code:
A1
Abstract:
A film forming apparatus and a film forming method are characterized in having
a vacuum chamber; a holding section turnably arranged in the vacuum chamber for
holding a subject whereupon a film is to be formed; a sputter source, which can
hold a plurality of targets and is rotatably arranged to vary the facing area of
the targets to the subject. Uniform and efficient film forming can be performed
in accordance with the size of the subject by the simple configuration, with less
possibility of contamination and easy maintenance.
Inventors:
KAWAMATA YOSHIO (JP)
Application Number:
PCT/JP2007/061455
Publication Date:
December 27, 2007
Filing Date:
June 06, 2007
Export Citation:
Assignee:
SHIBAURA MECHATRONICS CORP (JP)
KAWAMATA YOSHIO (JP)
KAWAMATA YOSHIO (JP)
International Classes:
C23C14/34
Foreign References:
| JP2004156122A | 2004-06-03 | |||
| JPS58110671A | 1983-07-01 | |||
| JP2004010905A | 2004-01-15 |
Attorney, Agent or Firm:
HYUGAJI, Masahiko et al. (4-1 Onoe-cho, 1-chome, Naka-k, Yokohama-shi Kanagawa 15, JP)
Download PDF: