Title:
FILM FORMING DEVICE, METHOD OF FILM FORMING, DEVICE AND METHOD FOR MANUFACTURING THIN-FILM SOLAR CELL
Document Type and Number:
WIPO Patent Application WO/2011/102053
Kind Code:
A1
Abstract:
Provided are a film forming device, a device for manufacturing a thin-film solar cell, a method of forming a film, and a method of manufacturing a thin-film solar cell wherein film forming can be performed without lowering the film quality for either a single or for multiple chambers, with a simple structure, and with the capability of downsizing, at lower cost, while having excellent maintainability. With regard to the film forming device, the method of film forming, the device (1) and the method of manufacturing a thin-film solar cell wherein the occurrence of plasma in a film forming chamber (2) forms an non-intrinsic conductive layer and a substantially intrinsic layer on a substrate (6), adhesion preventing boards (3, 4, 5) provided with first surfaces (3a, 4a, 5a) and second surfaces (3b, 4b, 5b) which are opposite the first surfaces (3a, 4a, 5a) are arranged on the inner wall surfaces (2a, 2b, 2c) of the film forming chamber (2). When the non-intrinsic conductive layer is being formed on the substrate (6), the first surfaces (3a, 4a, 5a) are faced toward the occurring plasma by rotating the adhesion preventing boards (3, 4, 5), and when the substantially intrinsic layer is being formed on the substrate (6), the second surfaces (3b, 4b, 5b) are faced toward the occurring plasma by rotating the adhesion preventing boards (3, 4, 5).
Inventors:
TAKENAKA KENSUKE (JP)
Application Number:
PCT/JP2010/072984
Publication Date:
August 25, 2011
Filing Date:
December 21, 2010
Export Citation:
Assignee:
FUJI ELECTRIC HOLDINGS (JP)
TAKENAKA KENSUKE (JP)
TAKENAKA KENSUKE (JP)
International Classes:
H01L31/04; H01L21/205
Foreign References:
| JPH055188B2 | 1993-01-21 | |||
| JP2000323411A | 2000-11-24 | |||
| JPH06206795A | 1994-07-26 | |||
| JPS56114387A | 1981-09-08 |
Attorney, Agent or Firm:
OKUYAMA, Shoichi et al. (JP)
Okuyama In addition, it is 1. (JP)
Okuyama In addition, it is 1. (JP)
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Claims: