Title:
FILM FORMING DEVICE
Document Type and Number:
WIPO Patent Application WO/2004/024982
Kind Code:
A1
Abstract:
A film forming device in which the injecting state of gas from each nozzle in a gas injection head is made appropriate. A gas injection head (7) in a processing space (1) comprises a number of spout sections (9) installed in a head surface (8) facing a treatment subject (5) for independently injecting individual processing gases, flow channels (16A, 17B, 18C) for introduction of individual processing gases, and flow channel members (10A, 11B, 12C) corresponding to individual processing gases, the flow channel members providing a laminated construction in which they are separated in a direction substantially along the head surface (8)to allow processing gases to be fed from nozzle-side flow channels (19A, 20B, 21C) of the flow channel members (10A, 11B, 12C) into the nozzles corresponding to the processing gases. Thereby, the individual processing gases are injected to the treatment subject (5) through the independent flow channels, so that film formation of good quality is attained.
Inventors:
INAGAKI TORU (JP)
YAMAMOTO KAZUMA (JP)
YOKOYAMA TAKASHI (JP)
SHIRAHATA TAKAHIRO (JP)
YAMAMOTO KAZUMA (JP)
YOKOYAMA TAKASHI (JP)
SHIRAHATA TAKAHIRO (JP)
Application Number:
PCT/JP2003/011599
Publication Date:
March 25, 2004
Filing Date:
September 10, 2003
Export Citation:
Assignee:
AIR WATER INC (JP)
INAGAKI TORU (JP)
YAMAMOTO KAZUMA (JP)
YOKOYAMA TAKASHI (JP)
SHIRAHATA TAKAHIRO (JP)
INAGAKI TORU (JP)
YAMAMOTO KAZUMA (JP)
YOKOYAMA TAKASHI (JP)
SHIRAHATA TAKAHIRO (JP)
International Classes:
C23C16/455; H01L21/31; C23C16/44; (IPC1-7): C23C16/455; H01L21/31
Foreign References:
| JPH03122281A | 1991-05-24 | |||
| JPH0638235U | 1994-05-20 | |||
| JPH08291385A | 1996-11-05 | |||
| JPH10280150A | 1998-10-20 | |||
| JP2000144432A | 2000-05-26 | |||
| JPH08186107A | 1996-07-16 |
Attorney, Agent or Firm:
Morimoto, Naoyuki (4-5 Tanimachi 2-Chome, Chuo-k, Osaka-City Osaka, JP)
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