Title:
FILM FORMING DEVICE
Document Type and Number:
WIPO Patent Application WO/2016/051559
Kind Code:
A1
Abstract:
The present invention provides a film forming device having a nozzle for mist jetting, whereby clogging can be prevented. The film forming device pertaining to the present invention is provided with a mist jetting head part (100) for jetting a raw material solution. The mist jetting head part (100) has a raw material solution jetting nozzle part (N1) and a raw material solution ejecting part (7), and the raw material solution jetting nozzle part (N1) has cavities (2, 3) and a raw material solution discharge part (5) bored in a side face inside the cavities (2, 3) in a position separated from a bottom face of the cavities (2, 3), the raw material solution discharge part (5) being connected to the raw material solution ejection part (7).
More Like This:
Inventors:
SHIRAHATA TAKAHIRO (JP)
ORITA HIROYUKI (JP)
ORITA HIROYUKI (JP)
Application Number:
PCT/JP2014/076310
Publication Date:
April 07, 2016
Filing Date:
October 01, 2014
Export Citation:
Assignee:
TOSHIBA MITSUBISHI ELEC INC (JP)
International Classes:
B05B1/04; B05B17/06
Domestic Patent References:
| WO2014068778A1 | 2014-05-08 | |||
| WO2012124047A1 | 2012-09-20 | |||
| WO2008117605A1 | 2008-10-02 | |||
| WO2013038484A1 | 2013-03-21 |
Foreign References:
| JP2000100834A | 2000-04-07 | |||
| US20110244130A1 | 2011-10-06 | |||
| JP2001205151A | 2001-07-31 |
Attorney, Agent or Firm:
YOSHITAKE Hidetoshi et al. (JP)
Hidetoshi Yoshitake (JP)
Hidetoshi Yoshitake (JP)
Download PDF: