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Title:
FILM FORMING DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/223770
Kind Code:
A1
Abstract:
Provided is a film forming device, comprising: a film forming cavity (91) used for forming a film on a substrate provided therein; a transfer unit used for transferring an anti-adherent plate (7) to the film forming cavity (91) along a transfer path (1), and moving to a first position, and moving the anti-adherent plate (7) out of the film forming cavity (91) along the transfer path (1); and a cleaning unit provided at the transfer path (1) provided outside the film forming cavity (91), and used for cleaning the anti-adherent plate (7) moved out of the film forming cavity (91).

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Inventors:
CHEN GUANGFEI (CN)
LIU DAGANG (CN)
LIU FENG (CN)
Application Number:
PCT/CN2018/082959
Publication Date:
December 13, 2018
Filing Date:
April 13, 2018
Export Citation:
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Assignee:
BOE TECHNOLOGY GROUP CO LTD (CN)
HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO LTD (CN)
International Classes:
C23C14/56; C23C14/34
Foreign References:
CN206768212U2017-12-19
CN102867717A2013-01-09
CN201301336Y2009-09-02
JPH05311427A1993-11-22
JP2003129233A2003-05-08
CN102119237A2011-07-06
JP2003034857A2003-02-07
JP2013064168A2013-04-11
CN201031252Y2008-03-05
US5509772A1996-04-23
CN205803584U2016-12-14
Attorney, Agent or Firm:
TEE & HOWE INTELLECTUAL PROPERTY ATTORNEYS (CN)
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