Title:
FILM PIEZOELECTRIC ACOUSTIC RESONATOR, FILTER, AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/179728
Kind Code:
A1
Abstract:
Disclosed are a film piezoelectric acoustic resonator, a filter, and an electronic device, comprising: an upper electrode, a piezoelectric layer, and a lower electrode stacked in order from top to bottom; the upper electrode, the piezoelectric layer, and the lower electrode are stacked in sequence in an effective resonance area, and the projection of the effective resonance area in the direction of the piezoelectric layer is a hexagon; the hexagon has a first side which is the longest in length, a second side opposite to the first side, a third side which is the shortest in length, and a fourth side opposite to the third side; the upper electrode that extends out of the effective resonance area from a first boundary of the effective resonance area is defined as an upper electrode extended portion; the lower electrode that extends out of the effective resonance area from a second boundary of the effective resonance area is defined as a lower electrode extended portion; one of the first boundary and the second boundary is the first side, and the other is the second side; a first opening on the third side penetrates the upper electrode, the piezoelectric layer, and the lower electrode outside of the effective resonance area; a second opening on the fourth side penetrates the upper electrode, the piezoelectric layer, and the lower electrode outside of the effective resonance area.
Inventors:
HUANG HERB HE (CN)
LUO HAILONG (CN)
LI WEI (CN)
LUO HAILONG (CN)
LI WEI (CN)
Application Number:
PCT/CN2020/137047
Publication Date:
September 16, 2021
Filing Date:
December 17, 2020
Export Citation:
Assignee:
NINGBO SEMICONDUCTOR INT CORP (CN)
International Classes:
H03H9/17; H03H3/02
Foreign References:
| CN112039482A | 2020-12-04 | |||
| CN108649920A | 2018-10-12 | |||
| CN105322908A | 2016-02-10 | |||
| US20130106534A1 | 2013-05-02 |
Attorney, Agent or Firm:
BEIJING SICHUANG DACHENG INTELLECTUAL PROPERTY AGENCY CO., LTD. (CN)
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